Thermo-Resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques
نویسندگان
چکیده
منابع مشابه
Thermo-Optical Properties of Thin-Film TiO2–Al2O3 Bilayers Fabricated by Atomic Layer Deposition
We investigate the optical and thermo-optical properties of amorphous TiO2–Al2O3 thin-film bilayers fabricated by atomic layer deposition (ALD). Seven samples of TiO2–Al2O3 bilayers are fabricated by growing Al2O3 films of different thicknesses on the surface of TiO2 films of constant thickness (100 nm). Temperature-induced changes in the optical refractive indices of these thin-film bilayers a...
متن کاملMEMS Pressure Sensor With Two Thin Film Piezoelectric Read-Out
We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the acceleration measurement. So it can be a better choice for the measurement of acceleration and it can have a huge potential as a micro-sen...
متن کاملTiO2 thin film gas sensor for monitoring ammonia
Systematic development and mechanistic studies of sensing materials are critical to the design of higher performance gas sensing elements and arrays. Polycrystalline metal-oxide semiconductors such as SnO2 and TiO2 are among the most widely used materials for thin film-based conductometric gas sensors. The mechanistic steps responsible for the gas-induced conductance changes of polycrystalline ...
متن کاملMicromachined thin-film gas flow sensor for microchemical reactors
As microchemical systems (MCS) have gained in importance since their introduction in the last decade, it has become recognized that appropriate sensing and control capabilities are needed if MCS are to reach their potential. In this context, we present a study of the working behavior of a novel thin-film micro flow sensor which is integrated with a silicon microreactor with a submillimeter chan...
متن کاملSnO2/Pt Thin Film Laser Ablated Gas Sensor Array
A gas sensor array was developed in a 10 × 10 mm(2) space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, r...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2008
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.128.347